Abstract—This article proposes an improved multi-frequency band pyroelectric sensor for extending the sensing frequency with a fine voltage responsivity to detect subjects with various velocities. The proposed sensor is built on a silicon substrate, consisting of four pyroelectric layers with various thicknesses deposited by sputtering and aerosol deposition (AD) method, top and bottom electrodes and a silicon nitride layer. The thinnest ZnO layer deposited by sputtering with a small thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers deposited by the AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The improved design is further for redeeming drawbacks of thicker pyroelectric layers with a tardy response at a high-frequency band and a thinner pyroelectric layer with a low voltage responsivity at a low-frequency band. The improved multi-frequency band pyroelectric sensor is successfully designed and analyzed in the present study, which could indeed extend the range of the multi-frequency band sensing. 
 

Index Terms—pyroelectric sensor, multi-frequency, zinc oxide, thin film, aerosol deposition, sputtering

Cite: Chun-Ching Hsiao and Sheng-Yi Liu, "Numerical Analysis for Voltage Responsivities of an Improved Multi-Frequency Band Pyroelectric Sensor," International Journal of Electronics and Electrical Engineering, Vol. 4, No. 1, pp. 39-42, February 2016. doi: 10.18178/ijeee.4.1.39-42